Next-Gen Nanofabrication, Lithography, Thin Films & NanoDevices

Course Overview

Program Syllabus

Module 1

About This Course

Nanofabrication lies at the heart of modern technologies such as semiconductors, MEMS/NEMS, nanoelectronics, photonic devices, biosensors, and quantum devices. Techniques like photolithography, electron-beam lithography, thin-film deposition, and etching allow precise control of materials and structures at the nanometer scale. Understanding these processes is essential for designing reliable, scalable, and high-performance nanodevices.

This workshop introduces next-generation nanofabrication workflows, covering lithography techniques, thin-film growth methods, pattern transfer, and device integration. Participants will explore how material choice, process parameters, and fabrication strategies influence device performance. Emphasis is placed on process understanding, design logic, and application pathways, making the workshop valuable for both researchers and industry-oriented learners.

Module 2

Aim

This workshop aims to provide in-depth knowledge of advanced nanofabrication techniques used to design and manufacture next-generation nano- and micro-scale devices. Participants will learn how lithography, thin-film deposition, and nanoscale patterning enable modern electronics, photonics, sensors, and biomedical devices. The program connects fabrication physics with practical device applications. It is designed to bridge academic research and industrial nanomanufacturing.

Module 3

Workshop Objectives

Understand fundamentals of nanofabrication and lithography techniques.
Learn thin-film deposition methods and material selection strategies.
Explore nanoscale patterning, etching, and process integration.
Analyze fabrication challenges such as defects, yield, and scalability.
Connect fabrication workflows to real-world nanodevice applications.

Module 4

Workshop Structure

Day 1: Nanofabrication Foundations & Lithography Process Chain

contamination control, classes, safety, process documentation
Top-down vs bottom-up fabrication; typical nano-device process flows
Substrates & wafer prep: silicon, glass, polymers; cleaning (RCA basics), dehydration bake, HMDS priming
Lithography overview: optical photolithography vs e-beam lithography vs nanoimprint lithography
Photoresists: positive/negative resists, spin coating, soft/hard bake, exposure, development
Critical concepts: resolution, depth of focus, alignment/overlay, CD control, proximity effects
Tools: Process flowcharts, mask design basics, lithography recipes, defect catalogs

Day 2: Thin Films, Deposition, Pattern Transfer & Etching

Thin-film fundamentals: thickness, stress, adhesion, conformity, grain structure, roughness
Deposition techniques: PVD (sputtering/evaporation), CVD/PECVD, ALD—selection criteria and trade-offs
Lift-off vs etch-back; hard masks; resist profiles for clean lift-off
Etching: wet etch vs dry etch (RIE/ICP); selectivity, anisotropy, etch rate control
Interface engineering: diffusion barriers, adhesion layers (Ti/Cr), contact formation basics
Process integration case study: metal interconnects or thin-film transistor stack walkthrough
Tools: Deposition parameter windows, etch recipes, stack engineering checklists

Day 3: NanoDevices, Metrology, Yield Thinking & Research-Grade Reporting

Nanodevice categories: nanosensors, thin-film transistors, photonic devices, MEMS/NEMS overview
Electrical basics for devices: contacts (ohmic/Schottky), I–V curves, leakage, breakdown concepts
Metrology & characterization: profilometry/ellipsometry, AFM, SEM, XRD, Raman, four-point probe, sheet resistance
Defects & troubleshooting: pinholes, edge beads, resist scumming, footing, redeposition, delamination, cracking
Yield and process control: repeatability, SPC basics, run sheets, process logs, DOE intro
Mini-project: design a design-to-device process flow (mask → lithography → deposition → etch → metrology → device test) + final report format
Tools: SPC/DOE templates, reporting structure, reproducibility checklists

Module 5

Who Should Enrol?

Doctoral Scholars & Researchers: PhD candidates seeking to integrate computational workflows into their molecular research.
Postdoctoral Fellows: Early-career scientists aiming to enhance their data-driven publication profile.
University Faculty: Professors and HODs interested in modern bioinformatics pedagogy and tool mastery.
Industry Scientists: R&D professionals from the Biotechnology and Pharmaceutical sectors transitioning to genomic-driven discovery.
Postgraduate Students: Final-year PG students looking for specialized research-grade exposure beyond standard curricula.

Module 6

Important Dates

Module 7

Registration Ends

02/06/2026
IST 7:00 PM

Module 8

Workshop Dates

02/06/2026 – 02/08/2026
IST 08:00 PM

Module 9

Workshop Outcomes

Participants will be able to:

Explain key nanofabrication and lithography techniques.
Understand thin-film growth and pattern transfer processes.
Relate fabrication parameters to nanodevice performance.
Identify suitable fabrication routes for different applications.
Communicate fabrication concepts confidently for research or industry roles.

Module 10

Fee Structure

Module 11

Student Fee

₹1799 | $70

Module 12

Ph.D. Scholar / Researcher Fee

₹2799 | $80

Module 13

Academician / Faculty Fee

₹3799 | $95

Module 14

Industry Professional Fee

₹4799 | $110

Module 15

What You’ll Gain

Live & recorded sessions
e-Certificate upon completion
Post-workshop query support
Hands-on learning experience

Module 16

Join Our Hall of Fame!

Take your research to the next level with NanoSchool.

Module 17

Publication Opportunity

Get published in a prestigious open-access journal.

Module 18

Centre of Excellence

Become part of an elite research community.

Module 19

Networking & Learning

Connect with global researchers and mentors.

Module 20

Global Recognition

Worth ₹20,000 / $1,000 in academic value.

Module 21

Need Help?

We’re here for you!

(+91) 120-4781-217

★★★★★

The Green NanoSynth Workshop: Sustainable Synthesis of NiO Nanoparticles and Renewable Hydrogen Production from Bioethanol

Good overrall presentations, i liked them. Would like to see a more in depth explanation of the applications, thank you !

Pascu • 04/15/2025 at 1:04 pm

★★★★★

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AI for Federated Learning: Decentralized Data and Privacy-Preserving Models

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Via Martin Luther King, 35
70014 Conversano (Ba) - ITA
VAT ID: IT06597060729

Please, send it to leonardo.cici@terasrl.it

Daniel Lotano • 11/05/2025 at 3:52 pm

★★★★★

Scientific Paper Writing: Tools and AI for Efficient and Effective Research Communication

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Veenu Choudhary • 05/19/2024 at 4:14 pm

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Course Overview

Program Syllabus

Module 1

About This Course

Module 2

Aim

Module 3

Workshop Objectives

Understand fundamentals of nanofabrication and lithography techniques.
Learn thin-film deposition methods and material selection strategies.
Explore nanoscale patterning, etching, and process integration.
Analyze fabrication challenges such as defects, yield, and scalability.
Connect fabrication workflows to real-world nanodevice applications.

Module 4

Workshop Structure

Day 1: Nanofabrication Foundations & Lithography Process Chain

contamination control, classes, safety, process documentation
Top-down vs bottom-up fabrication; typical nano-device process flows
Substrates & wafer prep: silicon, glass, polymers; cleaning (RCA basics), dehydration bake, HMDS priming
Lithography overview: optical photolithography vs e-beam lithography vs nanoimprint lithography
Photoresists: positive/negative resists, spin coating, soft/hard bake, exposure, development
Critical concepts: resolution, depth of focus, alignment/overlay, CD control, proximity effects
Tools: Process flowcharts, mask design basics, lithography recipes, defect catalogs

Day 2: Thin Films, Deposition, Pattern Transfer & Etching

Thin-film fundamentals: thickness, stress, adhesion, conformity, grain structure, roughness
Deposition techniques: PVD (sputtering/evaporation), CVD/PECVD, ALD—selection criteria and trade-offs
Lift-off vs etch-back; hard masks; resist profiles for clean lift-off
Etching: wet etch vs dry etch (RIE/ICP); selectivity, anisotropy, etch rate control
Interface engineering: diffusion barriers, adhesion layers (Ti/Cr), contact formation basics
Process integration case study: metal interconnects or thin-film transistor stack walkthrough
Tools: Deposition parameter windows, etch recipes, stack engineering checklists

Day 3: NanoDevices, Metrology, Yield Thinking & Research-Grade Reporting

Nanodevice categories: nanosensors, thin-film transistors, photonic devices, MEMS/NEMS overview
Electrical basics for devices: contacts (ohmic/Schottky), I–V curves, leakage, breakdown concepts
Metrology & characterization: profilometry/ellipsometry, AFM, SEM, XRD, Raman, four-point probe, sheet resistance
Defects & troubleshooting: pinholes, edge beads, resist scumming, footing, redeposition, delamination, cracking
Yield and process control: repeatability, SPC basics, run sheets, process logs, DOE intro
Mini-project: design a design-to-device process flow (mask → lithography → deposition → etch → metrology → device test) + final report format
Tools: SPC/DOE templates, reporting structure, reproducibility checklists

Module 5

Who Should Enrol?

Doctoral Scholars & Researchers: PhD candidates seeking to integrate computational workflows into their molecular research.
Postdoctoral Fellows: Early-career scientists aiming to enhance their data-driven publication profile.
University Faculty: Professors and HODs interested in modern bioinformatics pedagogy and tool mastery.
Industry Scientists: R&D professionals from the Biotechnology and Pharmaceutical sectors transitioning to genomic-driven discovery.
Postgraduate Students: Final-year PG students looking for specialized research-grade exposure beyond standard curricula.

Module 6

Important Dates

Module 7

Registration Ends

02/06/2026
IST 7:00 PM

Module 8

Workshop Dates

02/06/2026 – 02/08/2026
IST 08:00 PM

Module 9

Workshop Outcomes

Participants will be able to:

Explain key nanofabrication and lithography techniques.
Understand thin-film growth and pattern transfer processes.
Relate fabrication parameters to nanodevice performance.
Identify suitable fabrication routes for different applications.
Communicate fabrication concepts confidently for research or industry roles.

Module 10

Fee Structure

Module 11

Student Fee

₹1799 | $70

Module 12

Ph.D. Scholar / Researcher Fee

₹2799 | $80

Module 13

Academician / Faculty Fee

₹3799 | $95

Module 14

Industry Professional Fee

₹4799 | $110

Module 15

What You’ll Gain

Live & recorded sessions
e-Certificate upon completion
Post-workshop query support
Hands-on learning experience

Module 16

Join Our Hall of Fame!

Take your research to the next level with NanoSchool.

Module 17

Publication Opportunity

Get published in a prestigious open-access journal.

Module 18

Centre of Excellence

Become part of an elite research community.

Module 19

Networking & Learning

Connect with global researchers and mentors.

Module 20

Global Recognition

Worth ₹20,000 / $1,000 in academic value.

Module 21

Need Help?

We’re here for you!

(+91) 120-4781-217

★★★★★

The Green NanoSynth Workshop: Sustainable Synthesis of NiO Nanoparticles and Renewable Hydrogen Production from Bioethanol

Good overrall presentations, i liked them. Would like to see a more in depth explanation of the applications, thank you !

Pascu • 04/15/2025 at 1:04 pm

★★★★★

AI-Powered Customer Experience

I have not met him/her

purvesh mehta • 07/18/2025 at 4:19 pm

★★★★★

AI for Federated Learning: Decentralized Data and Privacy-Preserving Models

I need invoice with the following data:
Tera Srl
Via Martin Luther King, 35
70014 Conversano (Ba) - ITA
VAT ID: IT06597060729

Please, send it to leonardo.cici@terasrl.it

Daniel Lotano • 11/05/2025 at 3:52 pm

★★★★★

Scientific Paper Writing: Tools and AI for Efficient and Effective Research Communication

All facilities have explained everything nicely.

Veenu Choudhary • 05/19/2024 at 4:14 pm

View All Feedbacks →

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Next-Gen Nanofabrication, Lithography, Thin Films & NanoDevices

Course Overview

Program Syllabus

About This Course

Aim

Workshop Objectives

Workshop Structure

Who Should Enrol?

Important Dates

Registration Ends

Workshop Dates

Workshop Outcomes

Fee Structure

Student Fee

Ph.D. Scholar / Researcher Fee

Academician / Faculty Fee

Industry Professional Fee

What You&#8217;ll Gain

Join Our Hall of Fame!

Publication Opportunity

Centre of Excellence

Networking &#038; Learning

Global Recognition

Need Help?

Lead Instructor

Dr. Sarah Chen